kSA ICE
Employ multiple k-Space technologies to measure thin-film temperature, reflectivity, thickness, growth rate, stress, and curvature…
The kSA Integrated Control for Epitaxy (kSA ICE) is an optically based modular in situ metrology tool designed for today’s MOCVD and MBE reactors. The kSA ICE combines established k-Space technologies of the kSA MOS, kSA RateRat Pro, and an Emissivity Corrected Pyrometry (ECPR) module into a single, compact metrology tool. Select the modules for your kSA ICE based on your specific measurement needs — temperature, reflectivity, growth rate, film thickness, substrate curvature, and film stress.
Knowledge Base Articles
Data Acquisition and Analysis
Analyzing Single-Layer Reflectivity Data
Checking the Background Intensity of the Laser Spot Array
Setting up Acquisition Delays
System and Software Configuration
Acceptable Bend Radii for Optical Fibers
Calibrating kSA ICE ECP Using the kSA SpectraTemp
kSA TCP/IP Communication Capabilities
Replacing a kSA ICE Laser
Saving kSA Software Application Settings
Using IDL to Customize kSA Software Applications
Viewing Chamber Activity in Real-Time
Applicable to Multiple k-Space Products
Assigning Specific Settings to a kSA Application Shortcut
Copying and Pasting Data From k-Space Software Applications
Data and Image Filters
Exporting Data From kSA Software Applications
k-Space Data Types and File Formats
k-Space Metrology Tools Referenced in Peer-Reviewed Journals
Sentinel Key Information
Specifying the File Name for Acquired Data
kSA ICE Videos
Visit the k-Space Knowledge Base Video Library to view the following kSA ICE videos.
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- Hardware Overview and Setup (5 videos)
- Configuring the Rotation Monitor
- Using Markers During Multi-Wafer Data Acquisition
- Setting the Zero Point for the Home Pulse Signal
- Acquiring a Sapphire Reference Spectrum in Multi-Wafer Mode
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