kSA Emissometer
Generate high-resolution maps of diffuse and specular reflectance and total emissivity for MOCVD carriers…
The kSA Emissometer uses a triple-sensor head to simultaneously measure diffuse reflectance, specular reflectance, emissivity, and pocket depth as the wafer carrier rotates. The system uses these measurements to produce complete carrier maps for wafer quality analysis.
Knowledge Base Articles
Data Acquisition and Analysis
Analysis Regions in kSA Software Applications
Attaining a Proper UV LED Signal
Creating Height Correction Factors for Diffuse Reflectance and Emissivity
Setting up Acquisition Delays
Using Templates for Platen Data Analysis
Using the kSA Emissometer to Identify Defects
System and Software Configuration
kSA TCP/IP Communication Capabilities
Saving kSA Software Application Settings
Setting up the kSA Emissometer to Automatically Zero Height Readings
Using IDL to Customize kSA Software Applications
Applicable to Multiple k-Space Products
Assigning Specific Settings to a kSA Application Shortcut
Copying and Pasting Data From k-Space Software Applications
Data and Image Filters
Exporting Data From kSA Software Applications
k-Space Data Types and File Formats
Sentinel Key Information
Specifying the File Name for Acquired Data
kSA Emissometer Videos
Visit the k-Space Knowledge Base Video Library to view the following kSA Emissometer videos.
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- kSA Emissometer Overview
- Wafer Carrier and Pocket Statistical Analysis
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