kSA BandiT
Monitor absolute wafer and thin-film temperature in real-time during thin-film deposition and thermal processing…
The kSA BandiT uses a patented blackbody emission monitor to measure the full range of temperatures for most semiconductor substrate materials, including low band-gap substrates and metal films. This powerful instrument includes a solid-state spectrometer that adds the flexibility to measure film thickness and surface roughness.
Knowledge Base Articles
kSA BandiT Spectrometers
Calibrating the Spectrometer
kSA BandiT Spectrometer Options
kSA BandiT Spectrometer Slit Comparison
Reinstalling the Spectrometer Driver
Specifying Spectrometer Integration Times
Data Acquisition and Analysis
Acquiring a Dark Background
Analysis Regions in kSA Software Applications
Correcting kSA BandiT Spectra
Creating a Layer Recipe
Generating a Flat Field Correction File
kSA BandiT Automatic Intensity Control Feature
kSA BandiT Platen Mapping Guide
kSA BandiT Triggering Scenarios
L* a* b* Color Analysis
Peak Intensity vs Summed Intensity
Preparing Spectral Data to Send to k-Space
Recommended Fitting Parameters for STO (SrTiO3) Substrates
Setting up Acquisition Delays
Using Templates for Platen Data Analysis
System and Software Configuration
Angled Viewport Adapters
Choosing Between the kSA 400 and the kSA BandiT for Growth Rate/Film Thickness Measurements
Identifying and Configuring the Rotation Monitor Board
Installing or Re-Installing the kSA BandiT Software on Windows 10
kSA BandiT Geometric Configurations
kSA TCP/IP Communication Capabilities
Pin Numbers for the kSA BandiT 15-Pin D Connector
Replacing the kSA BandiT Scanning Detector
Resetting the Teensy Microprocessor
Saving kSA Software Application Settings
Using a Single Computer to Control Multiple kSA BandiT Systems
Using IDL to Customize kSA Software Applications
Viewing Chamber Activity in Real-Time
kSA BandiT Measurements
Example: Thermocouple Temperature vs Actual Sample Temperature
Measuring the Molybdenum Backing Plate Temperature
Minimum InGaAs Film Thickness for Blackbody Temperature Measurement
Setting a Phase Delay to Trigger Temperature Measurement
Using Pyrometric Oscillations to Measure Growth Rate
Using Spectral Interference Oscillations to Measure Film Thickness
Using the kSA BandiT to Measure Si Temperature
Using the kSA BandiT to Measure Temperature During MCT/CdTe Growth
Applicable to Multiple k-Space Products
Assigning Specific Settings to a kSA Application Shortcut
Copying and Pasting Data From k-Space Software Applications
Data and Image Filters
Exporting Data From kSA Software Applications
k-Space Data Types and File Formats
k-Space Metrology Tools Referenced in Peer-Reviewed Journals
Sentinel Key Information
Specifying the File Name for Acquired Data
kSA BandiT Videos
Visit the k-Space Knowledge Base Video Library to view the following kSA BandiT videos.
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- kSA BandiT Installation (14 videos)
- Programming the kSA Teensy Board
- Configuring the Detector Motion
- Resetting the Baseline of the Spectrometer Digital-to-Analog Converter
- Using Markers During Multi-Wafer Data Acquisition
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