Understand and control stress in thin-film and thermal annealing processes to achieve consistent optical, electronic, and mechanical properties…

The kSA Multi-beam Optical Sensor (kSA MOS) is a laser-based system that provides important insight into processes by monitoring thin-film parameters for curvature, stress, reflectivity, and growth rate in real-time.

k-Space has incorporated the kSA MOS technology into two high-resolution scanning metrology tools — kSA MOS ThermalScan and kSA MOS UltraScan — that measure curvature, bow, and tilt.