kSA MOS
Understand and control stress in thin-film and thermal annealing processes to achieve consistent optical, electronic, and mechanical properties…
The kSA Multi-beam Optical Sensor (kSA MOS) is a laser-based system that provides important insight into processes by monitoring thin-film parameters for curvature, stress, reflectivity, and growth rate in real-time.
k-Space has incorporated the kSA MOS technology into two high-resolution scanning metrology tools — kSA MOS ThermalScan and kSA MOS UltraScan — that measure curvature, bow, and tilt.
Knowledge Base Articles
Data Acquisition and Analysis
Analysis Regions in kSA Software Applications
Checking the Background Intensity of the Laser Spot Array
Correcting for Gravity-Induced Bow
Setting up Acquisition Delays
Using Curvature vs Bow Height to Determine Wafer Shape
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System and Software Configuration
Aligning the X and Y Etalons
Angled Viewport Adapters
Camera and Software Compatibility With Windows 11
kSA TCP/IP Communication Capabilities
Replacing a kSA MOS Laser
Saving kSA Software Application Settings
Setting Up a Servo-Controlled Mirror Mount
Using IDL to Customize kSA Software Applications
Viewing Chamber Activity in Real-Time
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General kSA MOS Information
(+/-) Sign for kSA MOS Stress Values
Determining the Distance from Sample Surface to CCD Detector
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Applicable to Multiple k-Space Products
Assigning Specific Settings to a kSA Application Shortcut
Copying and Pasting Data From k-Space Software Applications
Data and Image Filters
Exporting Data From kSA Software Applications
k-Space Data Types and File Formats
k-Space Metrology Tools Referenced in Peer-Reviewed Journals
Sentinel Key Information
Specifying the File Name for Acquired Data
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