kSA MOS ThermalScan
Scan wafers and analyze thermal stress (up to 1000C), curvature, film stress, and bow…
The kSA MOS ThermalScan integrates the original kSA MOS technology into a standalone unit with a heating chamber and two gas introduction lines for wafer thermal stress analysis at temperatures up to 1000°C. This high-resolution scanning instrument maps stress, curvature, and bow of semiconductor wafers, optical mirrors, glass, lenses, and other polished surface.
Knowledge Base Articles
Data Acquisition and Analysis
Analysis Regions in kSA Software Applications
Checking the Background Intensity of the Laser Spot Array
Creating and Using Process Control Recipes
Measuring Wafers at Very High Temperatures (~1000°C)
Setting up Acquisition Delays
System and Software Configuration
Aligning the X and Y Etalons
Checking the kSA MOS ThermalScan Heating Lamps
kSA TCP/IP Communication Capabilities
Reducing Vibration in kSA MOS UltraScan and kSA MOS ThermalScan Systems
Replacing the kSA MOS ThermalScan Thermocouple
Saving kSA Software Application Settings
Using IDL to Customize kSA Software Applications
General kSA MOS ThermalScan Information
kSA MOS ThermalScan Cooling Rate Test Results
kSA MOS ThermalScan Gas Flow and Pumping Controls
Tensile Stress vs. Compressive Stress
Applicable to Multiple k-Space Products
Assigning Specific Settings to a kSA Application Shortcut
Copying and Pasting Data From k-Space Software Applications
Data and Image Filters
Exporting Data From kSA Software Applications
k-Space Data Types and File Formats
k-Space Metrology Tools Referenced in Peer-Reviewed Journals
Sentinel Key Information
Specifying the File Name for Acquired Data
kSA MOS ThermalScan Videos
Visit the k-Space Knowledge Base Video Library to view the following kSA MOS ThermalScan videos.
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- Installation and Setup (13 videos)
- Vacuum Chamber Maintenance (17 videos)
- Custom kSA MOS ThermalScan System With Controlled Atmosphere (9 videos)
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