kSA MOS UltraScan
Scan reflective samples of various sizes — from wafers to glass panels — at resolutions better than 1 µm…
The kSA MOS UltraScan integrates the original kSAÂ MOS technology into a standalone unit with an x,y scanning range of 300 mm at exceptional resolutions. The scans are fully programmable and repeatable for selected area or full area map of wafers. The system also provides unmatched curvature, stress, and bow analysis capabilities.
Knowledge Base Articles
Data Acquisition and Analysis
Acquiring a Flat Reference
Acquiring a Wafer Reference
Analysis Regions in kSA Software Applications
Checking the Background Intensity of the Laser Spot Array
Correcting for Gravity-Induced Bow
Creating Scan Recipes
Scanning Patterned or Defective Wafers
Setting up Acquisition Delays
System and Software Configuration
Aligning the X and Y Etalons
Camera and Software Compatibility With Windows 11
kSA TCP/IP Communication Capabilities
Radius of Curvature and Bow Height Limits
Reducing Vibration in kSA MOS UltraScan and kSA MOS ThermalScan Systems
Saving kSA Software Application Settings
Using IDL to Customize kSA Software Applications
General kSA MOS UltraScan Information
Determining the Curved Mirror Height Above the Wafer
kSA MOS UltraScan Power Supply Compliance Certification
Tensile Stress vs. Compressive Stress
Applicable to Multiple k-Space Products
Assigning Specific Settings to a kSA Application Shortcut
Copying and Pasting Data From k-Space Software Applications
Data and Image Filters
Exporting Data From kSA Software Applications
k-Space Data Types and File Formats
k-Space Metrology Tools Referenced in Peer-Reviewed Journals
Sentinel Key Information
Specifying the File Name for Acquired Data
kSA MOS UltraScan Videos
Visit the k-Space Knowledge Base Video Library to view the following kSA MOS UltraScan videos.
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- kSA MOS UltraScan Installation (19 videos)
- Aligning the Spot Array
- Loading a Large Wafer
- Loading a Small Wafer
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