Measure optical constants (n and k), deposition rate, and film thickness in real-time…

The kSA RateRat is a compact, easy-to-use optical metrology tool that uses a diode laser and a high-speed photo detector for thin-film characterization. The proprietary algorithm continuously updates the film optical constants to determine deposition rate, layer thickness, and optical constants (n and k) with as little as 600 Å of material deposited. The kSA RateRat is compatible with most deposition methods, including MBE, MOCVD, sputtering, and PLD.